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INVENTORS: Kishkovich; Oleg (Greenville, RI); Rezuke; Robert W. (N. Grafton, MA); Kinkhead; Devon (Holliston, MA)
ASSIGNEES: Extraction Systems, Inc. (Franklin, MA)
U.S. CLASS: 96/153; 55/524
ABSTRACT: A clean, high efficiency, low pressure drop, adsorptive filter material that is porous and includes an acidic functional group. The filter can include, for example, a non-woven filter composite has a porous sulfonated divinyl benzene styrene copolymer beads having sulfonic acid functional side groups. The non-woven filter is used to remove molecular bases, including ammonia, organic amines, inides, aminoalcohols, alcoholoamines from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. XX
