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65. Fabrication of fluidic manifold systems using single exposure greyscale masks

Author Hayden-CJ; Burt-JPH; Inst. of Molec./Biomolec. Electron. University of Wales, Bangor, Gwynedd LL57 1UT, United Kingdom

Source Proceedings-of-SPIE-The-International-Society-for-Optical-Engineering. v 4404, 2001 p 231-237; Lithography for Semiconductor Manufacturing II. Edinburgh, United Kingdom Conf dates: 20010530-20010601; SPIE ST: Proceedings-of-SPIE-The-International-Society-for-Optical-Engineering

Abstract Lab-on-a-chip devices are currently being developed at the University of Wales, Bangor. These devices can be used to manipulate and characterise bio-particles suspended in a fluid medium. For precise operation, accurate fluidic transport within these devices is required, for example at channel junctions where flow rates or mixing must be controlled. We present a technique for the production of varying cross-section channels and fluidic manifolds by photolithographic exposure of greyscale masks. This technique is ideally suited to the rapid prototyping and production of lab-on-a-chip devices, since a single exposure system is both faster and simpler than other methods currently available. 6 Refs. (Auth abstract) XX




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