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57. Effects of rotor electrode in the fabrication of high aspect ratio microstructures by localized electrochemical deposition

Author Yeo-SH; Choo-JH; Sch. of Mech. and Prod. Engineering Nanyang Technological University, Singapore 639798, Singapore

Source Journal-of-Micromechanics-and-Microengineering. v 11 n 5 September 2001, p 435-442

Abstract This work reports on the effect of electrode rotation on the growth of nickel micro-columns fabricated by the localized electrochemical deposition (LECD) process - a new truly three-dimensional micro-rapid prototyping and direct-fabrication process capable of producing extremely high aspect ratio microstructures. The results shown here present a novel development in the area of LECD and a potential capability of the process for the fabrication of micro-pipes for possible applications such as medical drug delivery. Experiments were conducted on a specially assembled apparatus where nickel structures were electrodeposited onto Cu cathodes from a nickel sulfamate plating solution, using a non-soluble anode electrode. Deposition with electrode rotation produced columns with annulus cross sections, which indicate the existence of a uniform hollow core in the columns. This feature and dimensional control in the growth of the columns were not observed when using a stationary electrode. 21 Refs. (Auth abs tract) XX




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