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24. Complex ceramic-polymer composite microparts made by microstereolithography

Author Provin-C; Monneret-S

Source Proceedings-of-SPIE-The-International-Society-for-Optical-Engineering. v 4408, 2001 p 535-542; Design, Test, Integration, and Packaging of MEMS/MOEMS 2001. Cannes, France

Abstract The work we present here deals with the use of microstereolithography (muSL) to produce solid freeform objects from computer-assisted-design files. muSL process is derived from stereolithography, and it is based on the photopolymerization through a dynamic mask generator of successive layers of photocurable resin, which permits to produce acurate microobjects with high aspect ratio and curved surfaces (due to the layer-by-layer nature of the process). This technology is extended to the manufacture of ceramic-polymer composite parts. To achieve this, we add dispersed alumina powder (at a volumic percentage of 24%) and a visible photoinitiator to a low viscosity diacrylate resin. The object we made present interesting properties for microrobotic or microfluidic application. 24 Refs. (Auth abstract) XX




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