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1998 / Solid Freeform Fabrication Proceedings
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64. Rapid Prototyping of Titanium Nitride Using Three-Dimensional Laser Chemical Vapor Deposition

Author James Maxwell, Jubin Shah, Terry Webster, Jason Mock, Louisiana Tech University

Source Solid Freeform Fabrication Proceedings, 1998, pp 575-580

Abstract Selective vapor deposition of titanium nitride was realized from titanium tetrakis-dim- ethylamide, Ti(N(CH3)2)4, at pressures up to 138 mbar. High-aspect-ratio needles up to 12 mm long were grown at axial rates up to 10 microns/s. The morphology and composition of the fibers will be described. The temperature rise during transient growth was apparent in the grain size of the resulting needles. Severe mass-transport limitations were also observed due to the multiplicity of precursor by-products. A primary application of this work will be the rapid prototyping of highly-elastic, lightweight structural elements and matrices. Keywords: Laser Deposition, Titanium Nitride, Fibers, Freeform Growth, Micro- electromechanical Systems. (Auth abstract) [References: 21]




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Solid Freeform Fabrication Proceedings can be obtained from:  The Solid Freeform Fabrication Symposium

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The University of Texas at Austin
Laboratory for Freeform Fabrication / Texas Materials Institute
Mechanical Engineering Dept.
c/o The Solid Freeform Fabrication Symposium
MC C2200
Austin, TX 78712-1063 USA
512-471-3026; 512-471-7681 FX; Email: sffsymp@uts.cc.utexas.edu

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