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1998 / Solid Freeform Fabrication Proceedings
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58. Rapid Prototyping of Functional Three-Dimensional Microsolenoids and Electromagnets by High-Pressure Laser Chemical Vapor Deposition

Author J. Maxwell (a), K. Larsson (a), M. Boman (a), P. Hooge (b), Kirk Williams (b), P. Coane (b), (a) Uppsala University, (b) Louisiana Tech University

Source Solid Freeform Fabrication Proceedings, 1998, pp 529-536

Abstract High field-density microsolenoids from 100 to 500 microns in diameter were prototyped using both low and high pressure laser chemical vapor deposition. Tungsten lines were drawn about coated Co-Fe-Si-B magnetic cores from a mixture of WF6 and hydrogen, yielding prototype microelectromagnets. Free-standing tungsten carbide coils and single crystal tungsten needles were deposited at high deposition rates from a variety of WF6-H2-He mixtures. The WF6-H2-He system was studied to obtain desired crystal morphologies. The convective cooling and diffusion of Xe vs. He was explored. Carbon fibers and helices were also grown at pressures up to 3000 mbar from ethylene. Peak temperatures during the growth process were monitored continuously with a simple apparatus which will be described. The future of high-pressure LCVD for micro-scale rapid prototyping of metals appears to be promising. Keywords: Laser Deposition, Tungsten, Carbon, Direct-writing, Freeform Growth, Microsolenoid, Microelectromagnet, Microcoi ls, Microsprings, Probes (Auth abstract) [References: 8]




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