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1998 / Solid Freeform Fabrication Proceedings
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15. EFAB: Batch Production of Functional, Fully-Dense Metal Parts with Micron-Scale Features

Author Adam Cohen, Gang Zhang, FanGang Tseng, Florian Mansfeld, Uri Frodis, Peter Will, University of Southern California

Source Solid Freeform Fabrication Proceedings, 1998, pp 161-168

Abstract EFAB (Electrochemical FABrication) is a new SFF process with the potential to economically fabricate prototypes or mass production quantities of functional, mesoscale-microscale parts and mechanisms. EFAB generates an entire layer simultaneously--versus serially, as with most SFF. Based on electrodeposition, EFAB allows ultra-thin layers (2-10 microns, or even submicron) that minimize stairsteps, and produces a fully-dense metal structure that can be homogeneous and isotropic. Minimum feature width is approximately 25 microns, and can be reduced further. EFAB can be used to manufacture micromachines and microelectromechanical systems (MEMS), offering significant advantages over current processes: e.g., true 3-D geometry, IC compatibility, low capital investment, and process automation. (Auth abstract) [References: 3]




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