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5. Microfabrication with Femtosecond Laser Processing

Author Michelle Griffith, Pin Yang, George Burns, and Marc Harris Sandia National Laboratories Albuquerque, NM 87815

Source Solid Freeform Fabrication Proceedings, 2003, pp 50-59.

Abstract Our research investigates the special characteristics of femtosecond laser processing for microfabrication. The ultrashort pulse significantly reduces the thermal diffusion length. As a result, material is removed more efficiently with little damage to the surrounding feature volume. Currently, we are exploring the basic mechanisms that control femtosecond laser processing, to determine the process parameter space for laser processing of metals to address manufacturing requirements for feature definition, precision and reproducibility. One of the unique aspects to femtosecond radiation is the creation of localized structural changes. By scanning the focal point within a transparent material, we can create three-dimensional waveguides. This paper will describe our results to explore femtosecond laser ablation for laser processing of metals and glasses. We will discuss the effect of laser parameters on removal rate, feature size/definition, aspect ratio, material structure, and performance. Examples of component fabrication in metals and glasses will be shown. (Auth abstract) [References: 19] XX




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Solid Freeform Fabrication Proceedings can be obtained from:  The Solid Freeform Fabrication Symposium

or contact:

The University of Texas at Austin
Laboratory for Freeform Fabrication / Texas Materials Institute
Mechanical Engineering Dept.
c/o The Solid Freeform Fabrication Symposium
MC C2200
Austin, TX 78712-1063 USA
512-471-3026; 512-471-7681 FX; Email: sffsymp@uts.cc.utexas.edu

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