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78. Fabrication of freely movable microstructures by using two-photon three-dimensional microfabrication

Author Maruo, Shoji. Ikuta, Koji. Institution Nagoya Univ, Nagoya, Jpn

Source Proceedings of SPIE - The International Society for Optical Engineering. v 3937 2000. Society of Photo-Optical Instrumentation Engineers, Bellingham, WA, USA. p 106-112.

Abstract We report the latest three-dimensional (3D) fabrication system based on two-photon-initiated polymerization. In two-photon 3D microfabrication, 3D microstructures can be made by scanning an ultrashort-pulsed near-infrared laser beam inside liquid photopolymer without layer-by-layer process. Our current system has achieved lateral and depth resolutions of 0.2 mu m and 0.28 mu m, respectively. Movable micromechanisms, i.e., microgears, can be also fabricated without any use of supporting parts. For instance, a microgear (External diameter: 14 mu m) with an attached shaft was successfully fabricated. Rotation of a microgear was verified during washing out unsolidified photopolymer. (Auth abstract) [References: 13] XX




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