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50. Maskless fabrication of field-emitter array by focused ion and electron beam.

Author Yavas, O. Ochiai, C. Takai, M.

Source Applied Physics Letters. v. 76 no22, May 29 2000, p. 3319-21.

Abstract A dual-beam system composed of focused ion and electron beams for rapid prototyping of field-emitter arrays is presented. The gate openings were created by a 2-step fabrication process in which focused ion beam etching of the Nb layer was followed by wet etching of the SiO2 layer. Pt tips were deposited into these gate openings using an electron-beam-induced reaction and resulted in field emission. XX



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