1998 / DB reference year
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Author Zhang, X. Jiang, X N. Sun, C. Institution Pennsylvania State Univ, University Park, PA, USA
Source Micro-Electro-Mechanical Systems (MEMS) American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC. v 66 1998. ASME, Fairfield, NJ, USA. p 3-9. Proceedings of the 1998 ASME International Mechanical Engineering Congress and Exposition. Anaheim, CA, USA. 19981115-19981120.
Abstract Micro stereolithography ( mu SL) is a novel micro-manufacturing process which builds the truly 3D microstructures by solidifying the liquid monomer in a layer by layer fashion. In this work, an advanced micro stereolithography ( mu SL) apparatus is designed and developed which includes an Ar plus laser, the beam delivery system, computer-controlled precision x-y-z stages and CAD design tool, and in situ process monitoring systems. The 1.2 mu m resolution of mu SL fabrication has been achieved with this apparatus. The micro tubes with high aspect ratio of 16 and real 3D microchannels and micro cones are fabricated on silicon substrate. For the first time, micro stereolithography of ceramic micro gears has been successfully demonstrated. (Auth abstract) [References: 19] XX