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23. Compliant thermal microactuators

Author Jonsmann, Jacques. Sigmund, Ole. Bouwstra, Siebe.

Source Sensors & Actuators A-Physical. v 76 n 1-3 Aug 30 1999. p 463-469.

Abstract Two dimensional compliant metallic thermal microactuators are designed using topology optimisation, and microfabricated using rapid prototyping techniques. Structures are characterised using advanced image analysis, yielding a very high precision. Characterised structures behave in accordance with the intended behaviour. (Auth abstract) [References: 3] XX





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