late 1999 to early 2000 (and backfills for previous years) / DB reference years
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Author Jonsmann, J. Sigmund, O. Bouwstra, S.
Source Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) 1999. IEEE, Piscataway, NJ, USA,99CH36291.. p 588-593.
Abstract This paper describes design, microfabrication and characterization of topology optimized compliant electro-thermal microactuators. The actuators are fabricated by a fast prototyping process using laser micromachining and electroplating. Actuators are characterized with respect to displacement, force and work, by use of image analysis. Four different actuators are presented. These actuators are capable of displacements of 30 mu m and forces of 15 mN. The most recent actuator designs function in reasonable accordance with design predictions. (Auth abstract) [References: 6] XX